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"Etch Rate of Oxide Grown on Silicon Implanted with Different Ion ..."
Yang-Hee Joung, Seong-Jun Kang (2003)
- Yang-Hee Joung, Seong-Jun Kang:
Etch Rate of Oxide Grown on Silicon Implanted with Different Ion Implantation Conditions prior to Oxidation. J. Inform. and Commun. Convergence Engineering 1(2): 67-69 (2003)
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