"Nonstationary signal analysis and support vector machine based ..."

Marcus Musselman, H. Xie, Dragan Djurdjanovic (2019)

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DOI: 10.1007/S10845-017-1308-4

access: closed

type: Journal Article

metadata version: 2020-09-24

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Marcus Musselman, H. Xie, Dragan Djurdjanovic:
Nonstationary signal analysis and support vector machine based classification for vibration based characterization and monitoring of slit valves in semiconductor manufacturing. J. Intell. Manuf. 30(3): 1099-1110 (2019)

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