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"Invention principles and contradiction matrix for semiconductor ..."

D. Daniel Sheu, Chia-Hung Chen, Pang-Yen Yu (2012)

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DOI: 10.1007/S10845-010-0466-4

access: closed

type: Journal Article

metadata version: 2020-09-24

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D. Daniel Sheu, Chia-Hung Chen, Pang-Yen Yu:
Invention principles and contradiction matrix for semiconductor manufacturing industry: chemical mechanical polishing. J. Intell. Manuf. 23(5): 1637-1648 (2012)

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