"Development of a Low Resistance Micro Electro Magnetic Distance Sensor ..."

Xianhe Ding, Katsutoshi Kuribayashi, Takao Hashida (2000)

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DOI: 10.20965/JRM.2000.P0552

access: closed

type: Journal Article

metadata version: 2020-04-01

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Xianhe Ding, Katsutoshi Kuribayashi, Takao Hashida:
Development of a Low Resistance Micro Electro Magnetic Distance Sensor Using High Aspect Ratio Photo Resist. J. Robotics Mechatronics 12(5): 552-558 (2000)

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