"Application of Adaptive PID Temperature Control Algorithm under Spatial ..."

Zhenqiang Liu et al. (2022)

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DOI: 10.1155/2022/1713039

access: open

type: Journal Article

metadata version: 2022-09-26

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Zhenqiang Liu, Jinhui Lei, Yan Chen, Yang Xia, Jiaheng Feng, Shuaiqiang Ming, Wa Mao:
Application of Adaptive PID Temperature Control Algorithm under Spatial Thermal Model of ALD Reaction Chamber. J. Sensors 2022: 1-11 (2022)

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