"Microfabricated thermal absolute-pressure sensor with on-chip digital ..."

Carlos H. Mastrangelo, Richard S. Muller (1991)

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DOI: 10.1109/4.104194

access: closed

type: Journal Article

metadata version: 2025-02-26

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Carlos H. Mastrangelo, Richard S. Muller:
Microfabricated thermal absolute-pressure sensor with on-chip digital front-end processor. IEEE J. Solid State Circuits 26(12): 1998-2007 (1991)

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