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ORCID"CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS ..."
Jose Luis Muñoz-Gamarra, Arantxa Uranga, Núria Barniol (2016)
- Jose Luis Muñoz-Gamarra
, Arantxa Uranga, Núria Barniol:
CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology. Micromachines 7(2): 30 (2016)
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