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"Research on the Piezoelectric Properties of AlN Thin Films for MEMS ..."
Meng Zhang et al. (2015)
- Meng Zhang, Jian Yang, Chaowei Si, Guowei Han, Yongmei Zhao, Jin Ning:
Research on the Piezoelectric Properties of AlN Thin Films for MEMS Applications. Micromachines 6(9): 1236-1248 (2015)
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