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"Fabrication of sharp silicon tips employing anisotropic wet etching and ..."
Marco Antonio Robert Alves, D. F. Takeuti, Edmundo S. Braga (2005)
- Marco Antonio Robert Alves, D. F. Takeuti, Edmundo S. Braga:
Fabrication of sharp silicon tips employing anisotropic wet etching and reactive ion etching. Microelectron. J. 36(1): 51-54 (2005)
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