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"Etch characteristics of KOH, TMAH and dual doped TMAH for bulk ..."

Kanishka Biswas, S. Kal (2006)

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DOI: 10.1016/J.MEJO.2005.07.012

access: closed

type: Journal Article

metadata version: 2020-07-08

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Kanishka Biswas, S. Kal:
Etch characteristics of KOH, TMAH and dual doped TMAH for bulk micromachining of silicon. Microelectron. J. 37(6): 519-525 (2006)

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