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"Thickness dependence of the structural and electrical properties of copper ..."

Kah-Yoong Chan, Teck-Yong Tou, Bee-San Teo (2006)

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DOI: 10.1016/J.MEJO.2005.09.016

access: closed

type: Journal Article

metadata version: 2020-02-22

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Kah-Yoong Chan, Teck-Yong Tou, Bee-San Teo:
Thickness dependence of the structural and electrical properties of copper films deposited by dc magnetron sputtering technique. Microelectron. J. 37(7): 608-612 (2006)

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