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"Design and fabrication of silicon-based 8×8 MEMS optical switch array."
Cuiping Jia et al. (2009)
- Cuiping Jia, Jingran Zhou, Wei Dong, Weiyou Chen:
Design and fabrication of silicon-based 8×8 MEMS optical switch array. Microelectron. J. 40(1): 83-86 (2009)
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