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"Comprehensive assessment of MEMS double touch mode capacitive pressure ..."

Sumit Kumar Jindal, M. Aditya Varma, Deepali Thukral (2018)

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DOI: 10.1016/J.MEJO.2018.01.002

access: closed

type: Journal Article

metadata version: 2020-02-22

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Sumit Kumar Jindal, M. Aditya Varma, Deepali Thukral:
Comprehensive assessment of MEMS double touch mode capacitive pressure sensor on utilization of SiC film as primary sensing element: Mathematical modelling and numerical simulation. Microelectron. J. 73: 30-36 (2018)

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