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"Theoretical and numerical investigation of a new 3-axis SU-8 MEMS ..."
Awatef Khlifi et al. (2022)
- Awatef Khlifi
, Aftab Ahmed, Brahim Mezghani, Rajul Patkar, Pradeep Dixit, Fares Tounsi
, Maryam Shojaei Baghini:
Theoretical and numerical investigation of a new 3-axis SU-8 MEMS piezoresistive accelerometer. Microelectron. J. 128: 105552 (2022)
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