"Mechanical behavior of mismatch strain-driven microcantilever."

Sang-Hyun Kim, James G. Boyd, Sathyanarayanan Mani (2007)

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DOI: 10.1016/J.MEJO.2007.01.010

access: closed

type: Journal Article

metadata version: 2020-02-22

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Sang-Hyun Kim, James G. Boyd, Sathyanarayanan Mani:
Mechanical behavior of mismatch strain-driven microcantilever. Microelectron. J. 38(3): 371-380 (2007)

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