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"Different aspect ratio pyramidal tips obtained by wet etching of (100) and ..."

Drago Resnik et al. (2003)

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DOI: 10.1016/S0026-2692(03)00056-9

access: closed

type: Journal Article

metadata version: 2020-02-22

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Drago Resnik, Danilo Vrtacnik, Uros Aljancic, Matej Mozek, Slavko Amon:
Different aspect ratio pyramidal tips obtained by wet etching of (100) and (111) silicon. Microelectron. J. 34(5-8): 591-593 (2003)

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