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"Properties of ZnO/Cu/ZnO multilayer films deposited by simultaneous RF and ..."

Daya Ram Sahu, Jow-Lay Huang (2007)

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DOI: 10.1016/J.MEJO.2007.01.012

access: closed

type: Journal Article

metadata version: 2020-11-02

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Daya Ram Sahu, Jow-Lay Huang:
Properties of ZnO/Cu/ZnO multilayer films deposited by simultaneous RF and DC magnetron sputtering at different substrate temperatures. Microelectron. J. 38(3): 299-303 (2007)

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