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"A novel linearly tunable butterfly-shape MEMS capacitor."

Mohammad Shavezipur, Amir Khajepour, S. M. Hashemi (2008)

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DOI: 10.1016/J.MEJO.2007.12.026

access: closed

type: Journal Article

metadata version: 2020-11-09

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  - https://dblp.org/rec/journals/mj/ShavezipurKH08
Mohammad Shavezipur, Amir Khajepour, S. M. Hashemi:
A novel linearly tunable butterfly-shape MEMS capacitor. Microelectron. J. 39(5): 756-762 (2008)

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