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"A systematic dry etching process for profile control of quantum dots and ..."

Madnarski Sutikno, Uda Hashim, Zul Azhar Zahid Jamal (2007)

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DOI: 10.1016/J.MEJO.2007.07.081

access: closed

type: Journal Article

metadata version: 2020-02-22

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Madnarski Sutikno, Uda Hashim, Zul Azhar Zahid Jamal:
A systematic dry etching process for profile control of quantum dots and nanoconstrictions. Microelectron. J. 38(8-9): 823-827 (2007)

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