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"Optimization of loss tangent and capacitor size of micro-vacuum dielectric ..."

Wing-Shan Tam, Chi-Wah Kok, Hei Wong (2015)

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DOI: 10.1016/J.MEJO.2015.09.019

access: closed

type: Journal Article

metadata version: 2020-02-22

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Wing-Shan Tam, Chi-Wah Kok, Hei Wong:
Optimization of loss tangent and capacitor size of micro-vacuum dielectric capacitors. Microelectron. J. 46(12): 1382-1386 (2015)

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