"A novel narrowband MEMS filter with extensional mode resonators."

Zeyu Wu et al. (2024)

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DOI: 10.1016/J.MEJO.2024.106393

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type: Journal Article

metadata version: 2024-09-13

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Zeyu Wu, Junyuan Zhao, Wei Wang, Bo Niu, Botao Liu, Yawei Wang, Yinfang Zhu, Weibin Cui, Jinling Yang:
A novel narrowband MEMS filter with extensional mode resonators. Microelectron. J. 152: 106393 (2024)

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