"Investigation of a new method for dopant characterization."

Jérôme Adrian et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.07.091

access: closed

type: Journal Article

metadata version: 2023-08-03

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Jérôme Adrian, Nicolas Rodriguez, Fabien Essely, Gérald Haller, Catherine Grosjean, Alain Portavoce, Christophe Girardeaux:
Investigation of a new method for dopant characterization. Microelectron. Reliab. 47(9-11): 1599-1603 (2007)

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