"Strain investigation around shallow trench isolations : a LACBED Study."

Paul-Henri Albarède, S. Lavagne, C. Grosjean (2003)

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DOI: 10.1016/S0026-2714(03)00336-6

access: closed

type: Journal Article

metadata version: 2020-02-22

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Paul-Henri Albarède, S. Lavagne, C. Grosjean:
Strain investigation around shallow trench isolations : a LACBED Study. Microelectron. Reliab. 43(9-11): 1693-1698 (2003)

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