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"Effects of the metal gate on the stress-induced traps in ..."

Elena Atanassova, Albena Paskaleva, Nenad Novkovski (2008)

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DOI: 10.1016/J.MICROREL.2007.11.002

access: closed

type: Journal Article

metadata version: 2021-12-24

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Elena Atanassova, Albena Paskaleva, Nenad Novkovski:
Effects of the metal gate on the stress-induced traps in Ta₂O₅/SiO₂ stacks. Microelectron. Reliab. 48(4): 514-525 (2008)

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