"Doped Ta2O5 and mixed ..."

Elena Atanassova, Albena Paskaleva, D. Spassov (2012)

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DOI: 10.1016/J.MICROREL.2011.09.027

access: closed

type: Journal Article

metadata version: 2024-10-06

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Elena Atanassova, Albena Paskaleva, D. Spassov:
Doped Ta₂O₅ and mixed HfO₂-Ta₂O₅ films for dynamic memories applications at the nanoscale. Microelectron. Reliab. 52(4): 642-650 (2012)

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