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"A methodology to extract failure rates for low-k dielectric breakdown with ..."

Muhammad Bashir, Linda S. Milor (2009)

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DOI: 10.1016/J.MICROREL.2009.07.033

access: closed

type: Journal Article

metadata version: 2022-01-03

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Muhammad Bashir, Linda S. Milor:
A methodology to extract failure rates for low-k dielectric breakdown with multiple geometries and in the presence of die-to-die linewidth variation. Microelectron. Reliab. 49(9-11): 1096-1102 (2009)

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