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"The influence of hydrogen and nitrogen on the formation of Si nanoclusters ..."

Liliana Caristia et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.01.056

access: closed

type: Journal Article

metadata version: 2021-10-14

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Liliana Caristia, Giuseppe Nicotra, Corrado Bongiorno, Nicola Costa, Sebastiano Ravesi, Salvo Coffa, Riccardo De Bastiani, Maria Grazia Grimaldi, Corrado Spinella:
The influence of hydrogen and nitrogen on the formation of Si nanoclusters embedded in sub-stoichiometric silicon oxide layers. Microelectron. Reliab. 47(4-5): 777-780 (2007)

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