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"Metal defect localization of GaAs or Si based ICs by dynamic emission ..."

Xuanlong Chen, Liyuan Liu, Enliang Li (2017)

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DOI: 10.1016/J.MICROREL.2017.03.003

access: closed

type: Journal Article

metadata version: 2020-02-22

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Xuanlong Chen, Liyuan Liu, Enliang Li:
Metal defect localization of GaAs or Si based ICs by dynamic emission microscopy. Microelectron. Reliab. 72: 24-29 (2017)

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