"Comprehensive nanostructural study of SSRM nanocontact on silicon."

T. Delaroque et al. (2011)

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DOI: 10.1016/J.MICROREL.2011.07.067

access: closed

type: Journal Article

metadata version: 2020-02-22

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T. Delaroque, Bernadette Domengès, A. Colder, K. Danilo:
Comprehensive nanostructural study of SSRM nanocontact on silicon. Microelectron. Reliab. 51(9-11): 1693-1696 (2011)

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