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"MEMS technology integrated in the CMOS back end."

Roberto Gaddi et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.07.113

access: closed

type: Journal Article

metadata version: 2021-08-25

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  - https://dblp.org/rec/journals/mr/GaddiKUJLRSKY10
Roberto Gaddi, Robertus Petrus Van Kampen, Anartz Unamuno, Vikram Joshi, D. Lacey, Mickael Renault, Charles Smith, Richard Knipe, Dennis Yost:
MEMS technology integrated in the CMOS back end. Microelectron. Reliab. 50(9-11): 1593-1598 (2010)

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