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"Identification of oxide defects in semiconductor devices: A systematic ..."
Wolfgang Goes et al. (2018)
- Wolfgang Goes, Yannick Wimmer, Al-Moatasem El-Sayed
, Gerhard Rzepa, Markus Jech, Alexander L. Shluger, Tibor Grasser
:
Identification of oxide defects in semiconductor devices: A systematic approach linking DFT to rate equations and experimental evidence. Microelectron. Reliab. 87: 286-320 (2018)
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