"Miniaturised multi-MEMS sensor development."

Mathieu Hautefeuille et al. (2009)

> Home

Details and statistics

DOI: 10.1016/J.MICROREL.2009.02.017

access: closed

type: Journal Article

metadata version: 2023-09-30

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/mr/HautefeuilleOPO09
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/mr/HautefeuilleOPO09
Mathieu Hautefeuille, Brendan O'Flynn, Frank H. Peters, Conor O'Mahony:
Miniaturised multi-MEMS sensor development. Microelectron. Reliab. 49(6): 621-626 (2009)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.