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"The device characteristics of missing LDD implantation via nanoprobing ..."

Li-Lung Lai, Xiaojing Wu (2015)

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DOI: 10.1016/J.MICROREL.2015.05.015

access: closed

type: Journal Article

metadata version: 2020-02-22

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Li-Lung Lai, Xiaojing Wu:
The device characteristics of missing LDD implantation via nanoprobing techniques for localized failure analysis. Microelectron. Reliab. 55(8): 1144-1151 (2015)

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