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"UHV CAFM characterization of high-k dielectrics: Effect of the technique ..."

Mario Lanza et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.07.049

access: closed

type: Journal Article

metadata version: 2020-02-22

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Mario Lanza, Marc Porti, Montserrat Nafría, Xavier Aymerich, E. Whittaker, B. Hamilton:
UHV CAFM characterization of high-k dielectrics: Effect of the technique resolution on the pre- and post-breakdown electrical measurements. Microelectron. Reliab. 50(9-11): 1312-1315 (2010)

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