"Mechanism of O2-anneal induced Vfb shifts of Ru ..."

Z. Li et al. (2007)

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DOI: 10.1016/J.MICROREL.2007.01.054

access: closed

type: Journal Article

metadata version: 2020-02-22

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Z. Li, Tom Schram, Luigi Pantisano, A. Stesmans, Thierry Conard, S. Shamuilia, V. V. Afanasiev, A. Akheyar, Sven Van Elshocht, D. P. Brunco, W. Deweerd, Y. Naoki, P. Lehnen, Stefan De Gendt, Kristin De Meyer:
Mechanism of O₂-anneal induced V_fb shifts of Ru gated stacks. Microelectron. Reliab. 47(4-5): 518-520 (2007)

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