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"Void formation over limiting current density and impurity analysis of TSV ..."

Nay Lin, Jianmin Miao, Pradeep Dixit (2013)

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DOI: 10.1016/J.MICROREL.2013.04.003

access: closed

type: Journal Article

metadata version: 2020-02-22

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Nay Lin, Jianmin Miao, Pradeep Dixit:
Void formation over limiting current density and impurity analysis of TSV fabricated by constant-current pulse-reverse modulation. Microelectron. Reliab. 53(12): 1943-1953 (2013)

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