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"Application of high frequency scanning acoustic microscopy for the failure ..."

Stefan Oberhoff et al. (2016)

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DOI: 10.1016/J.MICROREL.2016.07.108

access: closed

type: Journal Article

metadata version: 2020-06-03

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  - journals/mr/OberhoffGTZG16
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  - https://dblp.org/rec/journals/mr/OberhoffGTZG16
Stefan Oberhoff, Kay Goetz, Karin Trojan, Martin Zoeller, Joachim Glueck:
Application of high frequency scanning acoustic microscopy for the failure analysis and reliability assessment of MEMS sensors. Microelectron. Reliab. 64: 656-659 (2016)

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