"Study of electrical and optical properties of CNx thin films ..."

E. L. Prociów, T. Chodzinski (2011)

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DOI: 10.1016/J.MICROREL.2011.03.031

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type: Journal Article

metadata version: 2020-02-22

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E. L. Prociów, T. Chodzinski:
Study of electrical and optical properties of CN_x thin films deposited by reactive magnetron sputtering. Microelectron. Reliab. 51(7): 1207-1212 (2011)

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