"A simple method for sub-100 nm pattern generation with I-line ..."

Tzu-I Tsai et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.01.019

access: closed

type: Journal Article

metadata version: 2020-02-22

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Tzu-I Tsai, Horng-Chih Lin, Min-Feng Jian, Tiao-Yuan Huang, Tien-Sheng Chao:
A simple method for sub-100 nm pattern generation with I-line double-patterning technique. Microelectron. Reliab. 50(5): 584-588 (2010)

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