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"Optical characterization of Si-rich silicon nitride films prepared by low ..."

Vassilis Emm. Vamvakas, Nikolaos Vourdas, S. Gardelis (2007)

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DOI: 10.1016/J.MICROREL.2007.01.073

access: closed

type: Journal Article

metadata version: 2021-06-01

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Vassilis Emm. Vamvakas, Nikolaos Vourdas, S. Gardelis:
Optical characterization of Si-rich silicon nitride films prepared by low pressure chemical vapor deposition. Microelectron. Reliab. 47(4-5): 794-797 (2007)

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