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"Characteristics optimization of N2O annealing on tungsten ..."

Jer-Chyi Wang et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.01.027

access: closed

type: Journal Article

metadata version: 2023-09-30

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Jer-Chyi Wang, Pai-Chi Chou, Chao-Sung Lai, Wen-Hui Lee, Chi-Fong Ai:
Characteristics optimization of N₂O annealing on tungsten nanocrystal with W/Si dual-sputtered method for nonvolatile memory application. Microelectron. Reliab. 50(5): 639-642 (2010)

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