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"The influence of assisted ion beam bombardment on structure and electrical ..."

X. M. Yang et al. (2011)

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DOI: 10.1016/J.MICROREL.2011.04.006

access: closed

type: Journal Article

metadata version: 2020-02-22

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X. M. Yang, L. J. Zhuge, X. M. Wu, T. Yu, S. B. Ge:
The influence of assisted ion beam bombardment on structure and electrical characteristics of HfSiO dielectric synthesized by DIBSD. Microelectron. Reliab. 51(12): 2115-2118 (2011)

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