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"Exploration of baking temperature effects on 28 nm BEOL reliability."

Xiangfu Zhao, Wei-Ting Kary Chien (2017)

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DOI: 10.1016/J.MICROREL.2017.03.019

access: closed

type: Journal Article

metadata version: 2020-02-22

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  - https://dblp.org/rec/journals/mr/ZhaoC17
Xiangfu Zhao, Wei-Ting Kary Chien:
Exploration of baking temperature effects on 28 nm BEOL reliability. Microelectron. Reliab. 72: 1-4 (2017)

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