"Improved electrical characteristics and reliability of amorphous InGaZnO ..."

Xiao Zou et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.04.002

access: closed

type: Journal Article

metadata version: 2020-02-22

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Xiao Zou, Guojia Fang, Longyan Yuan, Xingsheng Tong, Xingzhong Zhao:
Improved electrical characteristics and reliability of amorphous InGaZnO metal-insulator-semiconductor capacitor with high kappa HfO_xN_y gate dielectric. Microelectron. Reliab. 50(7): 954-958 (2010)

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