"Enhanced Lithographic Hotspot Detection via Multi-Task Deep Learning With ..."

Xinguang Zhang et al. (2025)

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DOI: 10.1109/OJCS.2024.3510555

access: open

type: Journal Article

metadata version: 2025-02-18

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Xinguang Zhang, Shiyang Chen, Zhouhang Shao, Yongjie Niu, Li Fan:
Enhanced Lithographic Hotspot Detection via Multi-Task Deep Learning With Synthetic Pattern Generation. IEEE Open J. Comput. Soc. 6: 140-151 (2025)

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