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"Limits of lithography."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

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Lloyd R. Harriott (2001)

Dagstuhl

Trier

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DOI: 10.1109/5.915379

access: closed

type: Journal Article

metadata version: 2021-08-17

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Lloyd R. Harriott:
Limits of lithography. Proc. IEEE 89(3): 366-374 (2001)

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last updated on 2021-08-17 21:07 CEST by the dblp team

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