"X-ray lithography-an overview."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Martin C. Peckerar, Juan R. Maldonado (1993)

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DOI: 10.1109/5.237534

access: closed

type: Journal Article

metadata version: 2022-06-13

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Martin C. Peckerar, Juan R. Maldonado:
X-ray lithography-an overview. Proc. IEEE 81(9): 1249-1274 (1993)

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