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"Essential SMSs: developing a service management scheme for semiconductor ..."
Fan-Tien Cheng, Haw Ching Yang, Chia-Ying Tsai (2004)
- Fan-Tien Cheng
, Haw Ching Yang, Chia-Ying Tsai:
Essential SMSs: developing a service management scheme for semiconductor factory management systems. IEEE Robotics Autom. Mag. 11(1): 26-40 (2004)
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