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"3-Axis Fully-Integrated Capacitive Tactile Sensor with Flip-Bonded CMOS on ..."

Sho Asano et al. (2017)

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DOI: 10.3390/S17112451

access: open

type: Journal Article

metadata version: 2022-10-02

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Sho Asano, Masanori Muroyama, Takahiro Nakayama, Yoshiyuki Hata, Yutaka Nonomura, Shuji Tanaka:
3-Axis Fully-Integrated Capacitive Tactile Sensor with Flip-Bonded CMOS on LTCC Interposer. Sensors 17(11): 2451 (2017)

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