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"Integrated, Speckle-Based Displacement Measurement for Lateral Scanning ..."

Gert Behrends, Dirk Stöbener, Andreas Fischer (2021)

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DOI: 10.3390/S21072486

access: open

type: Journal Article

metadata version: 2021-05-16

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Gert Behrends, Dirk Stöbener, Andreas Fischer:
Integrated, Speckle-Based Displacement Measurement for Lateral Scanning White Light Interferometry. Sensors 21(7): 2486 (2021)

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